Measuring By Light 2025 is proud to present an updated and dynamic Microsystems Workshop, hosted by Dr. Peter Steeneken and Dr. Gerard Verbiest (TU Delft). The workshop brings together leading voices from academia and industry to explore cutting-edge developments in MEMS and thin membrane characterization using advanced optical measurement techniques.
Join us for a highly focused afternoon featuring expert talks, a panel discussion, and a live demonstration using Polytec’s Vibrometer technology.
Workshop Programme – April 3, 2025
📍 Location: Senaatszaal, Aula Conference Centre, TU Delft
🕒 Time: 13:30 – 15:15
13:30 – 13:45
Gerard Verbiest – TU Delft
Opening & General Introduction
Welcome and outline of the workshop’s scope, goals, and relevance in the context of MEMS and modal analysis.
13:45 – 14:05
Maxime Leurquin & Wout Peeters – imec
The Future of MEMS: Development, Wafer-Level Inspection, and LDV Applications at imec
A view on current and future MEMS challenges, with insights into wafer-level inspection and LDV applications.
14:05 – 14:25
Farbod Alijani – TU Delft
Mode Shape Imaging and Parametric Excitation in Ultra-Thin Membranes
Innovations in actuation, mode shape characterization, and stress reconstruction in nanomembranes.
14:25 – 14:45
Markus Heilig – Polytec
Optical Metrology for Microsystems
Exploring SAW testing, through-cap MEMS inspection, and high-frequency LDV-based methods in industry applications.
14:45 – 15:15
Panel Discussion
Moderated by Dr. Peter Steeneken and Dr. Gerard Verbiest
An open Q&A session with all speakers to reflect on the future of optical MEMS inspection. Audience interaction encouraged.
15:15 – 16:15
Live Demonstration of MEMS Measurements using Polytec Vibrometer
- High-frequency Surface Acoustic Wave (SAW) measurement on demo sample using the MSA-600 X/U system
- Operating Deflection Shape (ODS) measurement in real-time
Who should attend?
This workshop is ideal for researchers, engineers, and professionals working in microsystems, MEMS, NEMS, metrology, or thin film technologies. Whether you’re exploring theoretical challenges or hands-on applications, this session will offer valuable insights and live examples.